Semiconductor Optoelectronics, Volume. 43, Issue 5, 854(2022)
Fabrication of Silicon Linear-mode APD Focal Plane Arrays
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GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, GUO Pei. Fabrication of Silicon Linear-mode APD Focal Plane Arrays[J]. Semiconductor Optoelectronics, 2022, 43(5): 854
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Received: May. 28, 2022
Accepted: --
Published Online: Jan. 27, 2023
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