Semiconductor Optoelectronics, Volume. 43, Issue 5, 854(2022)

Fabrication of Silicon Linear-mode APD Focal Plane Arrays

GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, and GUO Pei
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    Aiming at the requirements of avalanche photodiode (APD) focal plane in 3D-lidar imaging, a 2×128 silicon linear-mode APD focal plane module was prepared. It consisted of silicon based APD focal plane array, readout circuit and refrigeration package shell. APD pixels adopted the reach-through structure, achieved a high fill factor by large size micro-lens arrays, realized crosstalk suppression through isolation ring doping, and achieved breakdown voltage and response current uniformity through optimization of the ion implantation process. A low noise transimpedance amplifier circuit with large bandwidth and a high precision timing circuit were designed to realize narrow pulse width and high sensitivity detection. Airtight encapsulation was performed to achieve integrated APD focal plane refrigeration encapsulation with a refrigeration temperature difference over 40K. The test results show that the detection threshold optical power of the focal plane can reach 3.24nW, and the response non-uniformity is 3.8%, the crosstalk is 0.14%, and the minimum time resolution can reach 0.25ns, realizing the simultaneous output function of intensity information and time information.

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    GUO Anran, LEI Renfang, HUANG Jian, DENG Guangping, MA Huaping, HUANG Lieyun, GU Shunhu, GUO Pei. Fabrication of Silicon Linear-mode APD Focal Plane Arrays[J]. Semiconductor Optoelectronics, 2022, 43(5): 854

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    Paper Information

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    Received: May. 28, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022052802

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