Chinese Journal of Lasers, Volume. 38, Issue s1, 108002(2011)
Systematical Errors Correction of the Simultaneous Phase Shifting Interferometry
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Li Bo, Chen Lei, Li Jinpeng, Li Yan. Systematical Errors Correction of the Simultaneous Phase Shifting Interferometry[J]. Chinese Journal of Lasers, 2011, 38(s1): 108002
Paper Information
Category: Measurement and metrology
Received: Jul. 21, 2011
Accepted: --
Published Online: Nov. 15, 2011
The Author Email: Bo Li (542134007@qq.com)
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