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Acta Optica Sinica, Volume. 32, Issue 6, 623004(2012)

Study on Resonant Frequency for a Novel MEMS Micro Scanning Mirror

Yan Bin*, Yuan Weizheng, Qiao Dayong, Liu Yaobo, Wu Meng, and Li Zhao
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    Yan Bin, Yuan Weizheng, Qiao Dayong, Liu Yaobo, Wu Meng, Li Zhao. Study on Resonant Frequency for a Novel MEMS Micro Scanning Mirror[J]. Acta Optica Sinica, 2012, 32(6): 623004

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    Paper Information

    Category: Optical Devices

    Received: Dec. 1, 2011

    Accepted: --

    Published Online: May. 16, 2012

    The Author Email: Bin Yan (ybnwpu@163com.cn)

    DOI:10.3788/aos201232.0623004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology