Ultra-Precision Turning Process and Optimization of Infrared Diffraction Optical Mold Insert

Bo Sui; Furong Huo; Chuang Li; Chao Yang; Changxi Xue

doi:10.3788/AOS202242.1312004

Acta Optica Sinica, Volume. 42, Issue 13, 1312004(2022)

Ultra-Precision Turning Process and Optimization of Infrared Diffraction Optical Mold Insert

Bo Sui^1,2, Furong Huo^1,2、*, Chuang Li^1,2, Chao Yang^1,2, and Changxi Xue^1,2

Author Affiliations

¹School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

²Key Laboratory of Advanced Optical System Design and Manufacturing Technology of Universities of Jilin Province, Changchun University of Science and Technology, Changchun 130022, Jilin , China

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Abstract Get PDF(in Chinese)

Figures & Tables(14)

$Diagram of fabrication error of diffraction microstructure$

Fig. 1. Diagram of fabrication error of diffraction microstructure

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Fig. 2. Diagrams of tool deflection machining. (a) Profile error; (b) tool marks

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Fig. 3. Surface topography of SPDT turning process

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Fig. 4. Diagram of 3D surface profile of mold insert

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Fig. 5. Diagrams of relationships between manufacturing error and process parameters. (a) Periodic width error; (b) microstructure height error; (c) roughness

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$Diagrams of relationships between diffraction efficiency and process parameters. (a) Shadowing effect; (b) scattering effect; (c) comprehensive effect$

Fig. 6. Diagrams of relationships between diffraction efficiency and process parameters. (a) Shadowing effect; (b) scattering effect; (c) comprehensive effect

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$Relationship between diffraction efficiency and tool deflection angle under different slope$

Fig. 7. Relationship between diffraction efficiency and tool deflection angle under different slope

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Fig. 8. Diagram of experimental process

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Fig. 9. Error of substrate profile

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Fig. 10. Process results. (a) Mold insert; (b) surface roughness; (c) microstructure profile

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Fig. 11. Experimental results. (a) Periodic width error; (b) microstructure height error; (c) surface roughness

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$Relationship between diffraction efficiency and tool deflection angle under different period widths$

Fig. 12. Relationship between diffraction efficiency and tool deflection angle under different period widths

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Table 1. Process parameters of SPDT
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Table 1. Process parameters of SPDT
Parameter Value
Feed rate /（mm·min^-1） 2
Spindle speed /（r·min^-1） 2000
Depth of cut /μm 2
Tool radius /mm 0.25
Tool deflection angle /（°） 1.2-1.8

Table 2. Measurement data

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Table 2. Measurement data

Deflection angle /（°）	Periodic width error /μm	Microstructure height error /μm	Roughness /nm
1.20	7.597	0.118	3.059
1.34	8.285	0.123	2.995
1.44	9.867	0.139	2.948
1.54	10.069	0.157	2.933
1.62	10.157	0.164	2.915
1.69	10.371	0.167	2.906
1.76	10.888	0.173	2.869

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Bo Sui, Furong Huo, Chuang Li, Chao Yang, Changxi Xue. Ultra-Precision Turning Process and Optimization of Infrared Diffraction Optical Mold Insert[J]. Acta Optica Sinica, 2022, 42(13): 1312004

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