Piezoelectrics & Acoustooptics, Volume. 46, Issue 1, 83(2024)
Analysis of Sensitivity Mechanism of MEMS Gyro Sensitivity Based on Bidirectional Thermal Expansion Flow
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MA Xuanlin, PIAO Linhua, TONG Jiacheng, LIU Junyu. Analysis of Sensitivity Mechanism of MEMS Gyro Sensitivity Based on Bidirectional Thermal Expansion Flow[J]. Piezoelectrics & Acoustooptics, 2024, 46(1): 83
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Received: Sep. 26, 2023
Accepted: --
Published Online: Jul. 18, 2024
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