Researching | Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit

Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1313001(2022)

Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit

Daoxin Sun¹, Dongliang Zhang^1、*, Fu Bi¹, Lidan Lu¹, Zhehai Zhou², and Lianqing Zhu¹

Author Affiliations

¹Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China

²Beijing Laboratory of Optical Fiber Sensing and System, School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing 100016, China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (17)

Paper Information

Figures & Tables(17)

Fig. 1. Dual microring resonator structure based on SOI

Download full size

Fig. 2. Light field distribution of waveguides of different widths.(a) W=0.4 $μ m$ ,TE₀; (b) W=0.5 $μ m$ ,TE₀; (c) W=0.6 $μ m$ ,TE₀; (d) W=0.7 $μ m$ ,TE₀; (e) W=0.7 $μ m$ ,TE₁; (f) W=0.8 $μ m$ ,TE₀; (g) W=0.8 $μ m$ ,TE₁; (h) W=1.2 $μ m$ ,TE₀; (i) W=1.2 $μ m$ ,TE₁

Download full size

Fig. 3. Simulation diagram of the coupled structure

Download full size

Fig. 4. Relationship between coupling coefficient, transmission coefficient and coupling length

Download full size

Fig. 5. Simulation diagram of dual microring link

Download full size

Fig. 6. Relationship between resonance spectrum andcoupling coefficient

Download full size

Fig. 7. Relationship between quality factor and coupling coefficient under different transmission loss

Download full size

Fig. 8. Spectral wavelength near 1550 nm

Download full size

Fig. 9. Resonance curve of resonator with different transmission loss

Download full size

Fig. 10. Picture of the dual microring resonator chip and layout of key devices

Download full size

Fig. 11. Chip test module

Download full size

Fig. 12. Schematic diagram of the waveguide coupling test platform

Download full size

Fig. 13. Spectral ratio test fitting of the beam splitter

Download full size

Fig. 14. Loss of the grating coupling structure

Download full size

Fig. 15. Test spectrogram of dual microring resonator

Download full size

Table 1. Structural parameters of the microring resonator
View table
Table 1. Structural parameters of the microring resonator
Parameter Value Parameter Value
$W / μ m$ 0.5 $W_{r}$ $/ μ m$ 1.2
H $/ μ m$ 0.22 r $/ μ m$ 500
d $/ μ m$ 0.2 L_c $/ μ m$ 3360
L $/ μ m$ 10 Transmission loss /（dB·cm^-1） 2

Table 2. Test results and simulation results
View table
Table 2. Test results and simulation results
Category k FSR /nm FWHM（3 dB）/nm F Q /10⁴
Simulation 0.3 0.155 0.020 7.75 7.75
Experimentation 0.3 0.182 0.045 4.04 3.40

Tools

Get Citation

Copy Citation Text

Daoxin Sun, Dongliang Zhang, Fu Bi, Lidan Lu, Zhehai Zhou, Lianqing Zhu. Application of Silicon-Based Microring Resonant Cavity in Integrated Optical Gyroscope Sensitive Unit[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1313001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Integrated Optics

Received: Jul. 23, 2021

Accepted: Aug. 27, 2021

Published Online: Jun. 9, 2022

The Author Email: Dongliang Zhang (zdl_photonics@bistu.edu.cn)

DOI:10.3788/LOP202259.1313001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology