[1] [1] HAGELAUER A，FATTINGER G，RUPPEL C C W，et al. Microwave acoustic wave devices：recent advances on architectures，modeling，materials，and packaging［J］. IEEE Transactions on Microwave Theory and Techniques，2018，66（10）：4548-4562.

[2] [2] RUPPEL C C W. Acoustic wave filter technology-a review［J］. IEEE Trans Ultrason Ferroelectr Freq Control，2017，64（9）：1390-1400.

[3] [3] KIMURA T，OMURA M，KISHIMOTO Y，et al. Comparative study of acoustic wave devices using thin piezoelectric plates in the 3-5 GHz range［J］. IEEE Transactions on Microwave Theory and Techniques，2019，67（3）：915-921.

[4] [4] KALININ V，LOHR R，LEIGH A. Development of a calibration procedure for contactless torque and temperature sensors based on SAW resonators［C］//Beijing，China：2008 IEEE Ultrasonics Symposium，2008：1865-1868.

[5] [5] KADOTA M，TANAKA S. Improved quality factor of Hetero Acoustic Layer（HAL）SAW resonator combining LiTaO3 thin plate and quartz substrate［C］//Washington，DC：2017 IEEE International Ultrasonics Symposium（IUS），2017.

[6] [6] YANG Qinghua，XU Yao，WU Yongle，et al. A 3.4-3.6 GHz high-selectivity filter chip based on film bulk acoustic resonator technology［J］. Electronics，2023，12（4）：1056.

[7] [7] BUTAUD E，TAVEL B，BALLANDRAS S，et al. Smart Cut™ Piezo On Insulator（POI）substrates for high performances SAW components［C］//Las Vegas，NV，USA：2020 IEEE International Ultrasonics Symposium（IUS），2020：1-4.

[8] [8] PASTUREAUD T，SOLAL M，BIASSE B，et al. High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon［J］. IEEE Trans Ultrason Ferroelectr Freq Control，2007，54（4）：870-876.

[9] [9] XU H，FU S，SU R，et al. SAW filters on LiNbO3/SiC heterostructure for 5G n77 and n78 band applications［J］. IEEE Trans Ultrason Ferroelectr Freq Control，2023，70（9）：1157-1169.

[10] [10] OMORI T，MATSUDA K，YOKOYAMA N，et al. Suppression of transverse mode responses in ultra-wideband SAW resonators fabricated on a Cu-grating/15°YX-LiNbO3 structure［J］. IEEE Transactions on Ultrasonics，Ferroelectrics，and Frequency Control，2007，54（10）：1943-1948.

[12] [12] TAKAI T，IWAMOTO H，TAKAMINE Y，et al. I. H. P. SAW technology and its application to microacou-stic components（Invited）［C］//Washington，DC，USA：2017 IEEE International Ultrasonics Symposium（IUS），2017：1-8.

[13] [13] LIU Xiandong，LU Xiaoming，JIANG Wei，et al. Exploring transverse mode suppression with tilted IDTs in TF-SAW resonators［C］//Montreal，QC，Canada：2023 IEEE International Ultrasonics Symposium（IUS），2023：1-4.

[14] [14] MATSUDA S，MIURA M，MATSUDA T，et al. Experimental studies of quality factor deterioration in shear-horizontal-type surface acoustic wave resonators caused by apodization of interdigital transducer［J］. Japanese Journal of Applied Physics，2011，50（7S）：07HD14.