Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 474(2025)

Transverse Mode Suppression in X-Cut LNOI Resonators

WANG Haodong, SHUAI Yao, WU Chuangui, PENG Bin, PAN Xinqiang, and ZHANG Wanli
Author Affiliations
  • State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China
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    In this study,a surface acoustic wave(SAW)resonator,based on an X-cut LiNbO3-on-Insulator(LNOI)substrate,is investigated. Pseudofinger length weighting techniques is used to suppress transverse modes while precisely maintaining the resonator’s quality factor(Q factor). SAW resonators with different weighting electrodes are designed and fabricated. Then,the effects of weighting period and amplitude on the transverse modes are systematically investigated. A comparative analysis reveals the optimal weighted electrode configuration for the X-cut LNOI SAW resonator at a frequency of 2.5 GHz. Experimental results show that the weighted electrode effectively mitigates transverse modes induced by the X-cut LiNbO3 material,thereby enhancing the overall performance of the SAW resonator.

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    WANG Haodong, SHUAI Yao, WU Chuangui, PENG Bin, PAN Xinqiang, ZHANG Wanli. Transverse Mode Suppression in X-Cut LNOI Resonators[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 474

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    Paper Information

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    Received: Jan. 6, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.010

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