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Chinese Journal of Lasers, Volume. 49, Issue 4, 0404003(2022)

Detection Method for 248 nm Depolarizer Independent of Laser Intensity Fluctuation

Linghao Zhang1,2, Kegui Xia1,2、*, Xinghua Ma1, Linglin Zhu1, Aijun Zeng1,2、**, Huijie Huang1,2, and Avakaw Sergey3
Author Affiliations
  • 1Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
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    References (27)
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    Figures & Tables(10)
    Structure diagram of depolarizer

    Fig. 1. Structure diagram of depolarizer

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    Schematic of 248 nm depolarizer detection method

    Fig. 2. Schematic of 248 nm depolarizer detection method

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    10000-repeated measurement results for output intensity of excimer KrF laser

    Fig. 3. 10000-repeated measurement results for output intensity of excimer KrF laser

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    DOP versus vibration direction angle and beam size of incident light. (a) DOP versus vibration direction angle of incident light; (b) DOP versus beam diameter

    Fig. 4. DOP versus vibration direction angle and beam size of incident light. (a) DOP versus vibration direction angle of incident light; (b) DOP versus beam diameter

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    DOP versus extinction ratio of polarizer and analyser. (a) DOP versus polarizer extinction ratio; (b) absolute error between the measured and true DOP values versus analyser extinction ratio under different true DOP values

    Fig. 5. DOP versus extinction ratio of polarizer and analyser. (a) DOP versus polarizer extinction ratio; (b) absolute error between the measured and true DOP values versus analyser extinction ratio under different true DOP values

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    Absolute error curves of measured and true DOP values. (a) Absolute error versus rotation precision of analyser under different true values; (b) absolute error versus true DOP value under different probe accuracy values

    Fig. 6. Absolute error curves of measured and true DOP values. (a) Absolute error versus rotation precision of analyser under different true values; (b) absolute error versus true DOP value under different probe accuracy values

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    Experimental equipment for 248 nm depolarizer detection

    Fig. 7. Experimental equipment for 248 nm depolarizer detection

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    • Table 1. DOP measurement results obtained by wave-plate verification test

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      Table 1. DOP measurement results obtained by wave-plate verification test

      Ordinal numberDOP /%
      11.304
      21.333
      31.323
      41.300
      51.277
      61.237
      71.257
      81.367
      91.215
      101.289
      Mean value μ /%1.2902
      Standard deviation σ /%0.0458
      Coefficient of variation Cv /%3.5477

    • Table 2. DOP measurement results of depolarizer in repeatability test

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      Table 2. DOP measurement results of depolarizer in repeatability test

      Ordinal numberDOP /%
      12.026
      22.065
      32.161
      41.969
      52.123
      62.205
      72.010
      82.114
      92.001
      102.027
      Mean value μ /%2.0701
      Standard deviation σ /%0.0772
      Coefficient of variation Cv /%3.7287

    • Table 3. DOP measurement results of depolarizer in reproducibility test

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      Table 3. DOP measurement results of depolarizer in reproducibility test

      Ordinal numberDOP / %
      12.055
      22.141
      32.014
      41.924
      52.116
      62.023
      71.908
      82.266
      92.047
      102.243
      112.098
      122.162
      132.090
      142.211
      152.112
      162.153
      172.133
      182.069
      192.236
      202.272
      Mean value μ /%2.1137
      Standard deviation σ /%0.1030
      Coefficient of variation Cv /%4.8730
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    Linghao Zhang, Kegui Xia, Xinghua Ma, Linglin Zhu, Aijun Zeng, Huijie Huang, Avakaw Sergey. Detection Method for 248 nm Depolarizer Independent of Laser Intensity Fluctuation[J]. Chinese Journal of Lasers, 2022, 49(4): 0404003

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    Paper Information

    Category: Measurement and metrology

    Received: Jun. 2, 2021

    Accepted: Jul. 28, 2021

    Published Online: Jan. 18, 2022

    The Author Email: Xia Kegui (kegui.xia@siom.ac.cn), Zeng Aijun (aijunzeng@siom.ac.cn)

    DOI:10.3788/CJL202249.0404003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology