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Chinese Journal of Lasers, Volume. 40, Issue 10, 1008001(2013)

New Method of Restraining the Saturated Error in Phase Measuring Profilometry

Zhao Jing1、*, Wang Yongchang2, and Liu Kai1
Author Affiliations
  • 1[in Chinese]
  • 2KLA-Tencor, Milpitas, CA 95035, USA
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    Zhao Jing, Wang Yongchang, Liu Kai. New Method of Restraining the Saturated Error in Phase Measuring Profilometry[J]. Chinese Journal of Lasers, 2013, 40(10): 1008001

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 12, 2013

    Accepted: --

    Published Online: Sep. 17, 2013

    The Author Email: Jing Zhao (mirror_sc@126.com)

    DOI:10.3788/cjl201340.1008001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology