Chinese Journal of Lasers, Volume. 40, Issue 10, 1008001(2013)

New Method of Restraining the Saturated Error in Phase Measuring Profilometry

Zhao Jing1、*, Wang Yongchang2, and Liu Kai1
Author Affiliations
  • 1[in Chinese]
  • 2KLA-Tencor, Milpitas, CA 95035, USA
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    In three-dimensional (3D) scanning via phase measuring profilometry, if there exists saturation in captured patterned images, the accuracy of reconstructed 3D point clouds will be ruined. The phase error caused by saturated pixel values is studied, and a mathematical model for the error is derived. With such a model, a novel algorithm is proposed to minimize the phase error by employing unsaturated pixel values. The proposed method is proved by both simulation and experiment, i.e., analysis of the root mean square error of the corrected phase will show a 92.5% reduction in phase error in simulation, and an 82.8% reduction in phase error in the experiment.

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    Zhao Jing, Wang Yongchang, Liu Kai. New Method of Restraining the Saturated Error in Phase Measuring Profilometry[J]. Chinese Journal of Lasers, 2013, 40(10): 1008001

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 12, 2013

    Accepted: --

    Published Online: Sep. 17, 2013

    The Author Email: Jing Zhao (mirror_sc@126.com)

    DOI:10.3788/cjl201340.1008001

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