Infrared and Laser Engineering, Volume. 51, Issue 9, 20220389(2022)

Reduction of grid effect in ultra-light mirror machining by inflatable balanced method (invited)

Qiuyue Yu1, Xiaohua Zhou1, Guoyan Wang1, Guobao Qiao1, Tianbin Lv1, Zhaojian Zhang1, Jinghua Wang1, Jianye Shao1, and Yuntao Cheng2
Author Affiliations
  • 1Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
  • 2Institute of Optics-Electronics, Chinase Academy of Sciences, Chengdu 610209, China
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    Figures & Tables(10)
    Structural diagram of Ø350 mm ULE mirror
    Simulation analysis model of the mirror
    (a) Surface precision simulation result under 2000 Pa pressure; (b) Simulation result of Gaussian filtering (Frequency band error greater than 30 mm)
    Processing flow
    Polishing surface B by manipulator
    (a) Surface detection result of surface A; (b) Surface detection result of surface B
    (a) Gaussian filtering result of surface A; (b) Gaussian filtering result of surface B
    Surface precision comparison of surface A and surface B in the area of two support ribs
    • Table 1. Mechanical property parameters of ULE primary mirror

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      Table 1. Mechanical property parameters of ULE primary mirror

      Mechanical property parametersValue
      Modulus of elasticity/GPa67
      Density/t·mm−32.21×10−9
      Poisson's ratio0.17
    • Table 2. Analysis of PV and RMS values of surface shape at support ribs

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      Table 2. Analysis of PV and RMS values of surface shape at support ribs

      Surface ASurface BThe reduction rate
      PV of area 1/nm182.950.772.3%
      RMS of area 1/nm41.313.268.5%
      PV of area 2/nm133.959.355.7%
      RMS of area 2/nm38.710.373.4%
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    Qiuyue Yu, Xiaohua Zhou, Guoyan Wang, Guobao Qiao, Tianbin Lv, Zhaojian Zhang, Jinghua Wang, Jianye Shao, Yuntao Cheng. Reduction of grid effect in ultra-light mirror machining by inflatable balanced method (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220389

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Jun. 7, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220389

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