Effect of Annealing Atmosphere on Structure and Properties of Gallium Oxide Films

Zhiwen Tao; Zining Mao; Jiaxiong Xu

doi:10.3788/AOS231326

Acta Optica Sinica, Volume. 43, Issue 23, 2331002(2023)

Effect of Annealing Atmosphere on Structure and Properties of Gallium Oxide Films

Zhiwen Tao¹, Zining Mao², and Jiaxiong Xu^2、*

Author Affiliations

¹School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, Guangdong , China

²School of Integrated Circuits, Guangdong University of Technology, Guangzhou 510006, Guangdong , China

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Zhiwen Tao, Zining Mao, Jiaxiong Xu. Effect of Annealing Atmosphere on Structure and Properties of Gallium Oxide Films[J]. Acta Optica Sinica, 2023, 43(23): 2331002

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Paper Information

Category: Thin Films

Received: Jul. 27, 2023

Accepted: Sep. 6, 2023

Published Online: Dec. 12, 2023

The Author Email: Jiaxiong Xu (xujiaxiong@gdut.edu.cn)

DOI:10.3788/AOS231326

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology