[4] [4] LIU Z J, CHONG W C, WONG K M, et al. A novel BLU-free full-color LED projector using LED on silicon micro-displays ［J］. IEEE Photonics Technology Letters, 2013, 25(23): 2267-2270.

[5] [5] ZHANG L, OU F, CHONG W C, et al. Wafer-scale monolithic hybrid integration of Si-based IC and Ⅲ-Ⅴ epi-layers—A mass manufacturable approach for active matrix micro-LED micro-displays ［J］. Journal of the Society for Information Display, 2018, 26(3): 137-145.

[6] [6] SUGIURA N, CHUANG C T, HSIEH C T, et al. 12.1-inch 169-ppi full-color micro-LED display using LTPS-TFT backplane ［J］. SID Symposium Digest of Technical Papers, 2019, 50(1): 450-453.

[7] [7] DAY J, LI J, LIE D Y C, et al. Ⅲ-nitride full-scale high-resolution microdisplays ［J］. Applied Physics Letters, 2011, 99(3): 031116.

[8] [8] JIANG H X, LIN J Y. Nitride micro-LEDs and beyond-a decade progress review ［J］. Optics Express, 2013, 21(S3): A475-A484.

[9] [9] ZHANG K, PENG D, LAU K M, et al. Fully-integrated active matrix programmable UV and blue micro-LED display system-on-panel (SoP) ［J］. Journal of the Society for Information Display, 2017, 25(4): 240-248.

[10] [10] JUNG T, CHOI J H, JANG S H, et al. Review of micro-light-emitting-diode technology for micro-display applications ［J］. SID Symposium Digest of Technical Papers, 2019, 50(1): 442-446.

[11] [11] KIM D S, KIM S Y, JUNG J H, et al. High-quality imaging micro-LED display based on quantum dot CSP technology ［C］//Proceedings of Electronic Imaging, Color Imaging ⅩⅩⅢ: Displaying, Processing, Hardcopy, and Applications. Burlingame: Society for Imaging Science and Technology, 2018: 185-1-185-5.

[12] [12] NUESE C J, TIETJEN J J, GANNON J J, et al. Optimization of electroluminescent efficiencies for vapor-grown GaAs1-xPx diodes ［J］. Journal of the Electrochemical Society, 1969, 116(2): 248-253.

[13] [13] OH J T, LEE S Y, MOON Y T, et al. Light output performance of red AlGaInP-based light emitting diodes with different chip geometries and structures ［J］. Optics Express, 2018, 26(9): 11194-11200.

[14] [14] BAI J, CAI Y F, FENG P, et al. A direct epitaxial approach to achieving ultrasmall and ultrabright InGaN micro light-emitting diodes ( μLEDs) ［J］. ACS Photonics, 2020, 7(2): 411-415.

[15] [15] ISHIMOTO S, HAN D P, YAMAMOTO K, et al. Improvement of emission efficiency with a sputtered AlN buffer layer in GaInN-based green light-emitting diodes ［J］. Japanese Journal of Applied Physics, 2019, 58(SC): SC1040.

[16] [16] WANG Z X, MO C L, ZHENG C D, et al. Effect of AlGaN interlayer in bottom quantum barriers on efficiency enhancement of InGaN green light-emitting diodes ［J］. Superlattices and Microstructures, 2019, 128: 307-311.

[19] [19] LOOSE M, BELETIC J, GARNETT J, et al. High-performance focal plane arrays based on the HAWAII-2RG/4G and the SIDECAR ASIC ［C］//Proceedings of the SPIE 6690, Focal Plane Arrays for Space Telescopes Ⅲ. San Diego: SPIE, 2007: 66900C.

[20] [20] BELETIC J W, BLANK R, GULBRANSEN D, et al. Teledyne Imaging Sensors: infrared imaging technologies for astronomy and civil space ［C］//Proceedings of the SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy Ⅲ. Marseille: SPIE, 2008: 70210H.

[21] [21] BIRKBECK A L, FLYNN R A, OZKAN M, et al. VCSEL arrays as micromanipulators in chip-based Biosystems ［J］. Biomedical Microdevices, 2003, 5(1): 47-54.

[22] [22] TOKUDA T, KIMURA H, MIYATANI T, et al. CMOS on-chip bio-imaging sensor with integrated micro light source array for optogenetics ［J］. Electronics Letters, 2012, 48(6): 312-314.