Research on Laser Beam Splitting Diffractive Elements Based on Vector Adjoint Optimization

Guohui Chen; Liangping Xia; Chunyan Wang; Suihu Dang; Man Zhang; Shuai Wang; Hong Tu; Jingtian Lan; Chunlei Du

doi:10.3788/AOS241247

Acta Optica Sinica, Volume. 44, Issue 23, 2305001(2024)

Research on Laser Beam Splitting Diffractive Elements Based on Vector Adjoint Optimization

Guohui Chen^1,2,3, Liangping Xia^2,3、*, Chunyan Wang^1、**, Suihu Dang², Man Zhang², Shuai Wang^2,3, Hong Tu^2,3, Jingtian Lan^2,3, and Chunlei Du^2,3

Author Affiliations

¹School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

²Key Laboratory of Micro Nano Optoelectronic Devices and Intelligent Perception Systems, Yangtze Normal University, Chongqing 408100, China

³Zhuhai Multiscale Optoelectronics Technology Co., Ltd., Zhuhai 519060, Guangdong , China

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Abstract Get PDF(in Chinese)

Figures & Tables(7)

$Principle diagram of laser beam splitting using diffractive optical elements$

Fig. 1. Principle diagram of laser beam splitting using diffractive optical elements

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$Change curve of evaluation function F and dielectric constant distributions. (a) Evaluation function change curve; (b) initial dielectric constant distribution; (c) initial fuzzy dielectric constant distribution; (d) optimized dielectric constant distribution; (e) dielectric constant changes before and after optimization; (f) optimized beam splitting diffraction element array diagram$

Fig. 2. Change curve of evaluation function F and dielectric constant distributions. (a) Evaluation function change curve; (b) initial dielectric constant distribution; (c) initial fuzzy dielectric constant distribution; (d) optimized dielectric constant distribution; (e) dielectric constant changes before and after optimization; (f) optimized beam splitting diffraction element array diagram

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$Changes of diffraction efficiency of each diffraction order before and after optimization. (a) Diffraction efficiency distribution of each diffraction order before optimization; (b) diffraction efficiency distribution of each diffraction order after optimization$

Fig. 3. Changes of diffraction efficiency of each diffraction order before and after optimization. (a) Diffraction efficiency distribution of each diffraction order before optimization; (b) diffraction efficiency distribution of each diffraction order after optimization

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$Physical and local magnification of prepared diffractive element. (a) Nanoimprint physical image of laser beam splitting diffraction element; (b) SEM top view of laser beam splitting diffraction element; (c) magnified SEM image of laser beam splitting diffraction element; (d) cross section view of laser beam splitting diffraction element$

Fig. 4. Physical and local magnification of prepared diffractive element. (a) Nanoimprint physical image of laser beam splitting diffraction element; (b) SEM top view of laser beam splitting diffraction element; (c) magnified SEM image of laser beam splitting diffraction element; (d) cross section view of laser beam splitting diffraction element

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$Diffraction spot diagram obtained by industrial camera$

Fig. 5. Diffraction spot diagram obtained by industrial camera

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Table 1. Theoretical values of diffraction efficiency for different diffraction orders
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Table 1. Theoretical values of diffraction efficiency for different diffraction orders
Diffraction order -3 -2 -1 0 1 2 3
1 0.03300 0.03963 0.03410 0.04309 0.03692 0.04201 0.03778
0 0.04422 0.03356 0.03022 0.04236 0.02981 0.02894 0.03699
-1 0.02868 0.04209 0.03156 0.04263 0.03235 0.04250 0.03151

Table 2. Measured values of diffraction efficiency for different diffraction orders
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Table 2. Measured values of diffraction efficiency for different diffraction orders
Diffraction order -3 -2 -1 0 1 2 3
1 0.02705 0.03270 0.03181 0.03261 0.02869 0.03008 0.02648
0 0.03673 0.03104 0.02956 0.04806 0.02901 0.03178 0.03216
-1 0.02637 0.03314 0.02845 0.03453 0.03040 0.03300 0.02686

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Guohui Chen, Liangping Xia, Chunyan Wang, Suihu Dang, Man Zhang, Shuai Wang, Hong Tu, Jingtian Lan, Chunlei Du. Research on Laser Beam Splitting Diffractive Elements Based on Vector Adjoint Optimization[J]. Acta Optica Sinica, 2024, 44(23): 2305001

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Paper Information

Category: Diffraction and Gratings

Received: Jul. 3, 2024

Accepted: Aug. 26, 2024

Published Online: Dec. 19, 2024

The Author Email: Xia Liangping (xialp@yznu.edu.cn), Wang Chunyan (wcy@cust.edu.cn)

DOI:10.3788/AOS241247

CSTR:32393.14.AOS241247

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Theoretical values of diffraction efficiency for different diffraction orders

Table 1. Theoretical values of diffraction efficiency for different diffraction orders

Table 2. Measured values of diffraction efficiency for different diffraction orders

Table 2. Measured values of diffraction efficiency for different diffraction orders