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Acta Optica Sinica, Volume. 21, Issue 7, 853(2001)

Super-Resolution in 3-D Confocal Surface Profilometry

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Super-Resolution in 3-D Confocal Surface Profilometry[J]. Acta Optica Sinica, 2001, 21(7): 853

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 24, 2000

    Accepted: --

    Published Online: Aug. 10, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology