Fig. 1. Flexible THz devices based on MMs with independent structures. (a) Structure schematic of MA-MMs. (b) Calculated transmission spectra under different simulated conditions and experimental measurement results. (c) Physical image and micrograph. (d) Diagram of port settings with two different area sizes. (e) Simulated electric field distribution under different port settings.

Fig. 2. Simulated transmission response performance at different bending angles. (a) Deformation process of MMs. (b) Detailed transmission curve from 0° to 180°. (c), (d) The variations of three peaks in transmittance and frequency from 0° to 180°. (e) Comparison of frequency offset for three peaks. (f) Electric field distribution in the cross section at different bending angles.

Fig. 3. Experimental measurements of MA-MMs at different bending conditions. (a) Experimental photo of MMs compressed from flat to D=3  mm by the flexible fixture. (b) Experimental transmission spectra at different bending conditions corresponding to (a). (c)–(e) Variations of three peaks in amplitude, frequency, and frequency offset. (f) Comparison of Q-factors calculated from measurements under four bending angles.

Fig. 4. Experimental measurement of MA-MMs with different dimensions after bending deformation. (a) Structure diagram; (b) optical microscopic images; (c)–(f) measured transmission spectra of four samples at different bending angles; (g) Q-factor calculated from each transmission curve; (h) frequency shift variations in Rabi splitting.

Fig. 5. Simulated transmission response performance of MMs at different bending angles. (a) MM schematic with different array sizes. (b) Inverse proportion between the number of elements and the curvature. (c) Detailed transmission curve with the number of units increased from 5 to 10. (d), (e) Variations of three peaks in frequency and transmittance from 0° to 180°. (f) Electric field distribution of different arrays in the cross section.

Fig. 6. Experimental measurements of bending models with different sizes. (a) Bending model with a bending angle of 180°. (b) Inverse proportion between curvature and radius. (c) Measured transmission curves of MMs with four bending models. (d), (e) Variations of three peaks in transmittance and frequency. (f) Comparison of Q-factors calculated from measurements under four bending models.

Fig. 7. (a)–(c) Stacked lines by transmission spectra with different L1, L2, and G. (d)–(f) 3D color maps with different L1, L2, and G. (g)–(i) Q-factor with different L1, L2, and G.

Fig. 8. Electric field distribution at the incident plane when the bending angles are r=30°, 90°, 150°, 180°, respectively.