Chinese Journal of Lasers, Volume. 42, Issue 7, 703006(2015)

Simulation of Temperature Field for Laser Etching of Aluminum Thin Films on Polyimide Substrate

Liu Xiaoli*, Xiong Yuqing, Yang Jianping, Wang Rui, Wu Gan, and Ren Ni
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  • [in Chinese]
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    References(9)

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    CLP Journals

    [1] Zhang Hongwei, Ren Ni, Xue Hongtao, Tang Fuling, Yan Xiaodong, Lu Wenjiang, Liu Xiaoli. Temperature Distribution for Laser Etching of Metal Thin Films on Polyimide Substrate[J]. Chinese Journal of Lasers, 2016, 43(5): 503009

    [2] Yan Xiaodong, Ren Ni, Tang Fuling, Xue Hongtao, Zhang Hongwei, Yang Jianping, Liu Xiaoli. Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide[J]. Chinese Journal of Lasers, 2017, 44(4): 402001

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    Liu Xiaoli, Xiong Yuqing, Yang Jianping, Wang Rui, Wu Gan, Ren Ni. Simulation of Temperature Field for Laser Etching of Aluminum Thin Films on Polyimide Substrate[J]. Chinese Journal of Lasers, 2015, 42(7): 703006

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    Paper Information

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    Received: Jan. 30, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Xiaoli Liu (shantianzi@126.com)

    DOI:10.3788/cjl201542.0703006

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