Fig. 1. Beam shaping system with VCSEL containing freeform lens

Fig. 2. Schematic of grid distribution between virtual plane and target plane, and energy calculation on each grid. (a) Ray mapping relationship between virtual plane and target plane; (b) schematic representation of energy calculation on individual grid

Fig. 3. Optimized grid distributions on virtual surface and target surface. (a) Virtual plane; (b) target plane

Fig. 4. Irradiance distribution and profile on target surface for VCSEL directly illuminating. (a) Irradiance distribution; (b) profile

Fig. 5. Quarter section of freeform surface and its corresponding normal vector

Fig. 6. Solid model diagrams of freeform lens

Fig. 7. Irradiance distribution and profile curves on target surface generated by freeform lens. (a) Irradiance distribution; (b) profile

Fig. 8. Uniformity at different divergence angles

Fig. 9. Schematic diagram of VCSEL module array system

Fig. 10. Irradiance distribution and profile curves on target plane generated by specific freeform lens. (a) Irradiance distribution; (b) profile

Fig. 11. Variation of the evaluation function value with the number of iterations

Fig. 12. Freeform lens array

Fig. 13. Irradiance distribution and profile curves on target surface generated by VCSEL module array. (a) Irradiance distribution; (b) profile