Chinese Journal of Lasers, Volume. 41, Issue 12, 1216002(2014)

A Comparison and Analysis of Removal Function Based on Edge Effect with Different Pressure Distribution Models

Ji Jianwei1,2、*, Wei Chaoyang1, Hu Chen1, Zhang Haichao3, Xu Xueke3, and Shao Jianda1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(8)

    [1] [1] Jones R A. Optimization of computer controlled polishing[J]. Appl Opt, 1977, 16(1): 218-224.

    [2] [2] Yang Li. Advanced Optical Manufacturing Technology[M]. Beijing: Science Press, 2001.

    [4] [4] Zhang Xuejun, Yu Jingchi, Sun Xiafei, et al.. Edge control in computer controlled optical polishing[C]. SPIE, 1995, 2536: 293-300.

    [5] [5] Alberto Cordero-Davila, Jorge Gonzalez-Garcia, Mara Pedrayes-Lopez, et al.. Edge effects with the Preston equation for a circular tool and work-piece[J]. Appl Opt, 2004, 43(6): 1250-1254.

    [6] [6] Deng Weijie, Zhang Feng, Zheng Ligong. Removal function model and experiment of edge effect[J]. Infrared and Laser Engineering, 2011, 40(9): 1743-1748.

    [7] [7] Luna-Aguilar E, Cordero-Davila A, Gonzalez Garcia J. et al.. Edge effects with preston equation[C]. SPIE, 2003, 4840: 598-603.

    [8] [8] Shang Wenjin. Model Building and Simulation of Computer Control Deterministic Grinding and Polishing[D]. Changsha: National University of Defense Technology, 2005.

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    Ji Jianwei, Wei Chaoyang, Hu Chen, Zhang Haichao, Xu Xueke, Shao Jianda. A Comparison and Analysis of Removal Function Based on Edge Effect with Different Pressure Distribution Models[J]. Chinese Journal of Lasers, 2014, 41(12): 1216002

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    Paper Information

    Category: materials and thin films

    Received: May. 29, 2014

    Accepted: --

    Published Online: Sep. 18, 2014

    The Author Email: Ji Jianwei (jijw924@163.com)

    DOI:10.3788/cjl201441.1216002

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