Analysis of Light Field Modulation by Large-Aperture Diffractive Element Based on Response Function

Fig. 2. Light field distribution of plane wave passing through step structure. (a) Amplitude and (b) phase distribution corresponding to TE polarization; (c) amplitude and (d) phase distribution corresponding to TM polarization

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Fig. 3. Near field distributions after TE plane wave passes through gratings with different periods

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Fig. 4. Schematic of step positioning error

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Fig. 5. Variation curves of relative error RMS of light field with positioning error under minimum linewidth of different characteristic structures. (a) Minimum linewidth of the characteristic structure is 5λ; (b) minimum linewidth of the characteristic structure is 3λ; (c) minimum linewidth of the characteristic structure is λ

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Fig. 6. Near field distribution along radial direction after TE plane wave incident on the Fresnel lens

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Fig. 7. Near field distribution along radial direction after TM plane wave incident on the Fresnel lens

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Fig. 8. Intensity distribution of +1 focal plane after the plane wave passes through the lens. (a) TE polarized plane wave; (b) TM polarized plane wave

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Table 1. RMS of relative error of light field after plane wave passes through different gratings

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Table 1. RMS of relative error of light field after plane wave passes through different gratings

$Δ p$	Polarization mode	Min. width is 5λ		Min. width is 3λ		Min. width is λ
$Δ p$	Polarization mode	Amplitude	Phase	Amplitude	Phase	Amplitude	Phase
10λ	TE	1.67	0.52	1.51	0.86	8.55	3.91
10λ	TM	2.35	0.54	6.55	0.80	10.59	2.85
9λ	TE	1.53	0.46	1.60	0.78	7.66	2.19
9λ	TM	2.72	0.66	6.93	0.80	10.96	1.73
8λ	TE	1.24	0.49	0.91	0.80	7.10	2.10
8λ	TM	2.78	0.67	6.19	0.86	10.63	1.10
7λ	TE	0.94	0.53	1.01	1.02	8.01	2.17
7λ	TM	2.80	0.70	6.19	0.85	8.42	1.86
6λ	TE	1.27	0.63	1.76	0.88	8.84	2.30
6λ	TM	2.84	0.76	6.57	0.76	7.93	2.33
5λ	TE	2.59	0.74	2.38	0.87	13.06	3.32
5λ	TM	4.16	1.21	3.70	1.17	14.61	2.22
4λ	TE	3.66	1.09	3.53	1.13	15.51	4.36
4λ	TM	6.10	1.37	3.83	1.44	21.28	2.15

Table 2. RMS of relative error of light field after plane wave passes through the Fresnel lens

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Table 2. RMS of relative error of light field after plane wave passes through the Fresnel lens

Method	Polarization mode	Min. width is 5λ		Min. width is 3λ		Min. width is λ
Method	Polarization mode	Amplitude	Phase	Amplitude	Phase	Amplitude	Phase
STEP-RF	TE	6.45	2.30	9.93	3.82	13.87	20.41
STEP-RF	TM	8.51	2.64	15.01	4.40	18.40	17.56
Proposed	TE	54.89	10.18	103.80	17.18	83.68	102.15
Proposed	TM	84.62	10.05	176.37	17.33	44.14	502.47

Table 3. Comparison of intensity and diffraction efficiency of +1 order focal plane
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Table 3. Comparison of intensity and diffraction efficiency of +1 order focal plane
Method Max. of relative light intensity Diffraction efficiency /%
TE TM TE TM
FEM 1.000 1.000 39.03 35.31
STEP-RF 0.998 1.018 39.43 35.89
TEA 1.159 1.172 40.50 40.50

Table 4. Calculation time of near field distribution for Fresnel lenses with different calibers
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Table 4. Calculation time of near field distribution for Fresnel lenses with different calibers
Method Caliber of 0.5 mm Caliber of 1 mm Caliber of 5 mm Caliber of 50 mm
TE TM TE TM TE TM TE TM
FEM 93 97 182 193 （930）（970）（9300）（9700）
STEP-RF 0.060 0.059 0.073 0.072 0.188 0.186 1.296 1.342

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Dun Liu, Heng Shi, Lihua Wang, Guohan Gao, Bin Fan. Analysis of Light Field Modulation by Large-Aperture Diffractive Element Based on Response Function[J]. Acta Optica Sinica, 2023, 43(7): 0705001

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Paper Information

Category: Diffraction and Gratings

Received: Nov. 29, 2022

Accepted: Jan. 9, 2023

Published Online: Apr. 6, 2023

The Author Email: Liu Dun (liudun@ioe.ac.cn)

DOI:10.3788/AOS222071

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. RMS of relative error of light field after plane wave passes through different gratings

Table 1. RMS of relative error of light field after plane wave passes through different gratings

Table 2. RMS of relative error of light field after plane wave passes through the Fresnel lens

Table 2. RMS of relative error of light field after plane wave passes through the Fresnel lens

Table 3. Comparison of intensity and diffraction efficiency of +1 order focal plane

Table 3. Comparison of intensity and diffraction efficiency of +1 order focal plane

Table 4. Calculation time of near field distribution for Fresnel lenses with different calibers

Table 4. Calculation time of near field distribution for Fresnel lenses with different calibers