Acta Physica Sinica, Volume. 68, Issue 22, 224203-1(2019)
Fig. 1. Diffraction theoretical model under the broadband light source illumination. The broadband light source is a white LED, and the microstructure array is the RPG.宽带光源微光学元件衍射理论模型图(宽带光源为白光LED, 微光学元件为矩形位相光栅)
Fig. 2. Relative light intensity distributions of zero, positive and negative one order of diffraction beams of three primary colors, where the RPG period
Fig. 3. Relevant parameters of the dispersion parameter
Fig. 4. Influences of grating period
Fig. 5. Structural testing diagrams of the RPG sample: (a) After being developed; (b) the structural testing diagrams of the final sample after UV stamping.矩形光栅样品的结构测试图 (a)光刻显影后; (b)紫外线压印后
Fig. 6. Observation diagram of the diffraction beam: (a) At zero-dispersion boundary point (
Fig. 7. Contrast curves of the relationship between the test and theoretical value of
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Yan-Yan Huang, Xu-Lin Zhang, Wei Yang, Xiao-Bing Wang, Lei Lei, Wen-Da Peng, Ping Xu.
Received: May. 10, 2019
Accepted: --
Published Online: Sep. 17, 2020
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