[1] [1] LIU J,QIN L,LIU J C,et al.. A novel differential piezoelectric accelerating sensor[J].Opt. Precision Eng.,2007,15(6):903-909.(in Chinese)

[2] [2] CHE L F, LU Y, XU Z N. Finite element simulation on packaging of hinged high-g micromachined accelerometer[J].Opt.Precision Eng.,2007,15(2):199-205.(in Chinese)

[3] [3] ZHANG Y J, CHEN C H, WUB, et al.. Structure design of Mach-Zehnder interferometer in electrooptic integrated acceleration seismic geophone [J].Precision Eng.,2006,14(1)77-82.(in Chinese)

[4] [4] KULAH H, SALIAN A,YAZDI N, et al..A 5V closed-loop second-order sigma-delta micro-g micro accelerometer[C]. Solid-State Sensors and Actuators Workshop.Hilton Head, SC,2002:219-222.

[5] [5] LEMKIN M.Microaccelerometer design with digital feedback control[D]. Ph.D.dissertation,Berkeley:Dept. Mech. Eng ., Univ.California,1997.

[6] [6] LEMKIN M A,BOSER B E, AUSLANDER D,et al.. A 3 axis force balanced accelerometer using a single proof-mass[C].1997 International Con ference on Volumez Chicgo,1997,2:1185-1188.

[7] [7] CHAE J,KULAH H,NAJAFI K. An in-plane high-sensitivity,low-noise micro-g silicon accelerometer[C].16th IEEE Int .Conf.Kyoto,Japan,2003:19-23.

[8] [8] WU J,FEDDER G K, CARLEY L R. A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers[C].IEEE Int. Solid-State Circuits Conf.(ISSCC)Dig.Tech.Papers,2002,1:428-478.

[9] [9] KULAH H,CHAE J,NAJAFI K. Noise analysis and characterization of a Sigma-Delta capacitive microaccelerometer[C].IEEE Int.Conf. Sensors and Actuators (Transducers′03),Boston,2003:92-95.

[10] [10] RODJEGARD H,LOOF A. A differential chargetransfer readout circuit for mulitple output capacitive sensors[J].Sensors and Actuators,2005,119:309-315.