Fig. 1. Schematic diagram of flow circuit

Fig. 2. Schematic diagram of the heat sink, physical diagram of the package and microstructure of the two microchannels (S-shaped and rectangular)

Fig. 3. Distribution of serpentine heaters on the chip surface

Fig. 4. Variation of chip surface temperature with heat flow density

Fig. 5. Variation of maximum temperature difference on the chip surface with heat flow density

Fig. 6. S-shaped (S) and rectangular (R) microchannels with heat flow density as a function of the average temperature of the heat generating surface

Fig. 7. Variation of inlet and outlet pressure drop with heat flow density in S-shaped (S) and rectangular (R) microchannels

Fig. 8. Physical model of the heat sink for S-shaped microchannel

Fig. 9. Grid independence research and simulation verification

Fig. 10. Temperature, velocity nephogram and streamline diagram of manifold S-shaped and straight wall microchannels

Fig. 11. Effect of amplitude parameter A on heat transfer and flow performance of the microchannel

Fig. 12. Effect of frequency parameter B on heat transfer and flow performance of the microchannel