Opto-Electronic Engineering, Volume. 34, Issue 9, 46(2007)

Design of fold laser projection lithography lens

[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    References(3)

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    [2] [2] JAIN K,ZEMEL M,KLOSNER M.Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication[J].Proceedings of the IEEE,2002,90(10):1681-1688.

    [3] [3] JAIN K,KLOSNER M,ZEMEL M,et al.Flexible electronics and displays:high-resolution,roll-to-roll,projection lithography and photoablation processing technologies for high-throughput production[J].Proceeding of the IEEE,2005,93(8):1500-1510.

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    [in Chinese], [in Chinese], [in Chinese]. Design of fold laser projection lithography lens[J]. Opto-Electronic Engineering, 2007, 34(9): 46

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    Paper Information

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    Received: Oct. 20, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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