Chinese Journal of Lasers, Volume. 26, Issue 6, 560(1999)

Design of Fly′s Eye Homogenizer for Excimer Laser Micromachining

[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    References(6)

    [1] [1] G. Klauminzer, C. Abele. Excimer lasers need specifications for beam uniformity. Laser Focus World, 1991, 27(5):153~158

    [2] [2] Y. Kawamura, Y. Itagaki, K. Toyoda et al.. A simple optical device for generating square flat-top intensity irradiation from a Gaussian laser beam. Opt. Commun., 1983, 48(1):44~46

    [3] [3] M. R. Latta, K. Jain. Beam intensity uniformization by mirror folding. Opt. Commun., 1984, 49(6):435~439

    [4] [4] P. W. Rhodes, D. L. Shealy. Refractive optical systems for irradiance redistribution of collimated radiation: their design and analysis. Appl. Opt., 1980, 19(20):3545~3553

    [5] [5] C. Y. Han, Y. Ishii, K. Murata. Reshaping collimated laser beams with Gaussian profile to uniform profiles. Appl. Opt., 1983, 22(22):3644~3647

    [6] [6] R. E. Grojean, D. Feldman. Production of flat top beam profiles for high energy lasers. Rev. Sci. Instrum., 1980, 51(3):375~376

    CLP Journals

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    [2] Jin Yuhua, Zhao Yan, Jiang Yijian. Microlens Beam Shaping and Homogenizing Optical System for Excimer Laser[J]. Chinese Journal of Lasers, 2015, 42(6): 602003

    [3] Jin Yuhua, Zhao Yan, Jiang Yijian. Simulation of Excimer Laser Based on Zemax Software[J]. Chinese Journal of Lasers, 2013, 40(9): 902010

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    [in Chinese], [in Chinese], [in Chinese]. Design of Fly′s Eye Homogenizer for Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 1999, 26(6): 560

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    Paper Information

    Category: laser manufacturing

    Received: Dec. 15, 1997

    Accepted: --

    Published Online: Aug. 9, 2006

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