Chinese Journal of Lasers, Volume. 26, Issue 6, 560(1999)
Design of Fly′s Eye Homogenizer for Excimer Laser Micromachining
This paper describes a fly′s eye homogenizer for excimer laser micromachining. It has high performance in averaging the strong intensity fluctuations of the incident excimer laser beam and low transmitting loss. The dimension of the output beam can be adjusted continuously.
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[in Chinese], [in Chinese], [in Chinese]. Design of Fly′s Eye Homogenizer for Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 1999, 26(6): 560
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