Optical Technique, Volume. 51, Issue 1, 123(2025)

Error control of small gap phase shift measurement

ZHU HongYu, WANG Qing*, and XV Hang
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    References(5)

    [2] [2] Moore R C. Phase modulation of grazing incidence interferometer: USA,US19800155203[P].2024-10-26.

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    [7] [7] Kuriyama Y, Kawasaki K. Oblique incidence interferometer[J]. Journal of the Japan Society for Precision Engineering,1990,56(10):1788—1790.

    [8] [8] Langenbeck P .Interferometry for precision measurement[M]. Washington:SPIE,2014,39—44.

    CLP Journals

    [1] YE Lu, ZHANG Jin-ping, ZHENG Lie-hua, HAO Pei-min. Design of Back Null Compensator Test Method of Convex Aspherical Surface[J]. Acta Photonica Sinica, 2015, 44(4): 422002

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    ZHU HongYu, WANG Qing, XV Hang. Error control of small gap phase shift measurement[J]. Optical Technique, 2025, 51(1): 123

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    Paper Information

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    Received: Jul. 1, 2024

    Accepted: Feb. 18, 2025

    Published Online: Feb. 18, 2025

    The Author Email: Qing WANG (wangqing@njust.edu.cn)

    DOI:

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