Optical Technique, Volume. 51, Issue 1, 123(2025)
Error control of small gap phase shift measurement
[2] [2] Moore R C. Phase modulation of grazing incidence interferometer: USA,US19800155203[P].2024-10-26.
[4] [4] Birch K G. Oblique incidence interferometry applied to non-optical surfaces[J]. Journal of Physics E: Scientific Instruments,2001,6(10):1045—1048.
[6] [6] Higuchi T, Mizutani Y, Iwata T, et al. Stroboscopic oblique-incidence interferometer for motion visualization of stator of ultrasonic motor[J]. Physics Procedia,2011,19(1):82—87.
[7] [7] Kuriyama Y, Kawasaki K. Oblique incidence interferometer[J]. Journal of the Japan Society for Precision Engineering,1990,56(10):1788—1790.
[8] [8] Langenbeck P .Interferometry for precision measurement[M]. Washington:SPIE,2014,39—44.
Get Citation
Copy Citation Text
ZHU HongYu, WANG Qing, XV Hang. Error control of small gap phase shift measurement[J]. Optical Technique, 2025, 51(1): 123