Acta Optica Sinica, Volume. 34, Issue 6, 622001(2014)
Computer-Aided Alignment for the Lithographic Lens
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Zhao Feifei, Tang Jianyu, Huang Wei, Xu Weicai. Computer-Aided Alignment for the Lithographic Lens[J]. Acta Optica Sinica, 2014, 34(6): 622001
Paper Information
Category: Optical Design and Fabrication
Received: Dec. 12, 2013
Accepted: --
Published Online: Apr. 23, 2014
The Author Email: Feifei Zhao (guangdianfeifei@126.com)
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