Acta Optica Sinica, Volume. 20, Issue 5, 638(2000)
Infrared Absorption Characterization of Diamond-Like Carbon Films
[1] [1] Kühl Ch,Schlotterer H,Schwidefsky F.Optical investigation of different silicon films. J. Electro. Chem. Soc.: Solid-State Science and Technology,1974,121(11):1496~1500
[2] [2] Dischler B,Bubenzer A,Koidl P.Hard carbon coatings with low optical absorption. Appl. Phys. Lett., 1983, 42(8):636~638
[4] [4] Dischler B,Bubenzer A,Koidl P.Bonding in hydrogenated hard carbon studied by optical spectroscopy.Solid State Commun.,1983,48(2):105~108
[5] [5] Hiraki A,Kawano T,Kawakami Y et al..Tetrahedral carbon film by hydrogen gas reactive RF-sputtering of graphite onto low temperature substrate.Solid State Commun.,1984,50(8):713~716
[7] [7] Craig S,Harding G L.Structure,optical properties and decomposition kinetics of sputtered hydrogenated carbon.Thin Solid Films,1982,97(2):345~361
[8] [8] Bubenzer A,Dischler B,Brandt G et al..rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation,properties and applications.J.Appl.Phys.,1983,54(8):4590~4595
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Infrared Absorption Characterization of Diamond-Like Carbon Films[J]. Acta Optica Sinica, 2000, 20(5): 638