Journal of Infrared and Millimeter Waves, Volume. 40, Issue 5, 634(2021)

664 GHz sub harmonic mixer based on “T” anode GaAs SBD membrane circuit

Bin NIU1,2、*, Jun QIAN1,3, Dao-Yu FAN1, Yuan-Qing WANG1,3, Liang MEI1,3, Jun-Jie DAI1,3, Ming ZHOU1,2, Tang-Sheng CHEN1, and Tangsheng Chen1,2
Author Affiliations
  • 1Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,China
  • 2Nanjing Chip Valley Industrial Technology Institute,Nanjing 210016,China
  • 3Nanjing Antaixin Electornic Co. Ltd.,Nanjing 210016,China
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    Figures & Tables(6)
    “T” shape anode of GaAs SBD: (a) schematic picture with Cjp and Cj0; (b) SEM picture of 0.5 μm anode metal section.
    Characteristics of “T” shape anode GaAs SBD with different anode size: (a)Cj0, Cjp and 1/Rs versus anode area; (b)ft versus anode diameter.
    GaAs membrane sub harmonic mixer design: (a) 3D design diagram; (b) microscope picture of the finished mixer.
    Pictures of 664GHz receiver (a) and measurement setup (b)
    Measured and simulated DSB conversion loss of the membrane mixer
    • Table 1. Epitaxy layer structure of GaAs SBD membrane circuit

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      Table 1. Epitaxy layer structure of GaAs SBD membrane circuit

      Layer functionMaterialDopingThickness
      Schottky contactGaAsn-,1e17cm-3100nm
      Ohmic contactGaAsn+,7e18cm-31μm
      MembraneGaAsnid5μm
      Etch-stopAlGaAsnid50nm
      SubstrateGaAsS.I./
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    Bin NIU, Jun QIAN, Dao-Yu FAN, Yuan-Qing WANG, Liang MEI, Jun-Jie DAI, Ming ZHOU, Tang-Sheng CHEN, Tangsheng Chen. 664 GHz sub harmonic mixer based on “T” anode GaAs SBD membrane circuit[J]. Journal of Infrared and Millimeter Waves, 2021, 40(5): 634

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    Paper Information

    Category: Research Articles

    Received: Oct. 22, 2020

    Accepted: --

    Published Online: Sep. 29, 2021

    The Author Email: Bin NIU (niubin_1@126.com)

    DOI:10.11972/j.issn.1001-9014.2021.05.009

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