Fig. 1. Structure diagram of thermo-optic switch. (a) Top-view diagram of thermo-optic switch; (b) cross-section of the suspended waveguide

Fig. 2. Relations between the core thickness b and the effective refractive index n of the rectangle waveguide

Fig. 3. Thermal field distribution of thermo-optic switch waveguides. (a) Conventional waveguide; (b) suspended waveguide

Fig. 4. SEM images of the cross-section of thermo-optic switch waveguides. (a) Conventional waveguide; (b) suspended waveguide

Fig. 5. Output pattern of thermo-optic switch

Fig. 6. Output optical power of thermo-optic switches with different waveguide versus electrical heating power

Fig. 7. Switch response curves of thermo-optic switch