Fig. 1. Experimental system structure

Fig. 2. Schematic of common path array scanning imaging

Fig. 3. Calibration pattern and its alignment pattern with FOV and laser dot matrix. (a) Calibration pattern; (b) receiving FOV after calibration; (c) illumination dot matrix after calibration

Fig. 4. Diagram of FOV deviation in bi-static mode ^[26]

Fig. 5. Photon count distribution curves of backward reflection and echo signals under different conditions. (a) Front surface of PBS is placed perpendicular to outgoing beam; (b) front surface of PBS is placed at small angle with outgoing beam

Fig. 6. Distribution of dark count rate of each pixel in SPAD array. (a) 1^st collection; (b) 2^nd collection; (c) 3^rd collection; (d) 4^th collection; (e) 5^th collection; (f) distribution of pixels with dark count rate greater than 200 Hz on planar array

Fig. 7. 1D distribution of dark count rate

Fig. 8. Target scene and imaging results before and after correction. (a) Target scene; (b) distance image before correction; (c) distance image after correction

Fig. 9. Imaging target and experimental site photograph

Fig. 10. Scanning trace

Fig. 11. Reference ground truth image of target

Fig. 12. Low resolution and high resolution scan reconstruction distance images. (a) Scanning point 1 in Fig. 10; (b) scanning point 2 in Fig. 10; (c) scanning point 3 in Fig. 10; (d) scanning point 4 in Fig. 10; (e) high resolution distance image obtained by scanning reconstruction

Fig. 13. Imaging results under different SPP conditions. (a) 8.49; (b) 4.28; (c) 1.23; (d) 0.86; (e) 0.44