Fundamentals of atomic and close-to-atomic scale manufacturing: a review

Jian Gao; Xichun Luo; Fengzhou Fang; Jining Sun

doi:10.1088/2631-7990/ac3bb2

International Journal of Extreme Manufacturing, Volume. 4, Issue 1, 12001(2022)

Fundamentals of atomic and close-to-atomic scale manufacturing: a review

Jian Gao¹, Xichun Luo^1、*, Fengzhou Fang^2,3, and Jining Sun⁴

Author Affiliations

¹Centre for Precision Manufacturing, DMEM, University of Strathclyde, Glasgow G1 1XJ, United Kingdom

²State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin 300072, People’s Republic of China

³Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin 4, Ireland

⁴School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, People’s Republic of China

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Jian Gao, Xichun Luo, Fengzhou Fang, Jining Sun. Fundamentals of atomic and close-to-atomic scale manufacturing: a review[J]. International Journal of Extreme Manufacturing, 2022, 4(1): 12001

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Paper Information

Category: Topical Review

Received: Aug. 19, 2021

Accepted: --

Published Online: Jan. 22, 2023

The Author Email: Xichun Luo (xichun.luo@strath.ac.uk)

DOI:10.1088/2631-7990/ac3bb2

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology