Acta Optica Sinica, Volume. 44, Issue 4, 0412005(2024)

Carrier Frequency Calculation of Interference Fringes at Low Spatial Frequencies

Zhe Zhang1, Donghui Zheng1、*, Lei Chen1, and Jinpeng Li2
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu , China
  • 2Nanjing NAIRC Photoelectric Instruments Co., Ltd., Chinese Academy of Sciences, Nanjing 211300, Jiangsu , China
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    Figures & Tables(9)
    Errors for different carrier frequencies when interferogram background is homogeneous. (a) Error of fx; (b) error of fy; (c) error of fz
    Errors for different carrier frequencies when interferogram background is not homogeneous. (a) Error of fx; (b) error of fy; (c) error of fz
    Simulation of application for carrier frequency parameters in phase-shift interferometry. (a) Phase-shift interferograms; (b) actual phase; (c) calculated phase; (d) residual
    Comparison between proposed method and phase-shift method
    Experiment of the application for carrier frequency parameters in phase-shift interferometry. (a) Phase-shift interferograms; (b) phase
    Effect of estimates. (a) Effect of estimates on fx; (b) effect of estimates on fy; (c) effect of estimates on fz
    Effect of PV of phase. (a) Effect of phase on fx; (b) Effect of phase on fy; (c) Effect of phase on fz
    • Table 1. Repeatability results

      View table

      Table 1. Repeatability results

      No.fx /λfy /λfz /λ
      Standard deviation0.00390.00750.0012
      12.96463.01320.4522
      22.95883.01490.4519
      32.96513.00490.4530
      42.96793.01280.4530
      52.97033.01420.4507
      62.96983.00230.4523
      72.96392.99990.4521
      82.96143.00150.4536
      92.96572.99450.4546
      102.97053.01430.4546
    • Table 2. Performance at different carrier frequencies

      View table

      Table 2. Performance at different carrier frequencies

      No.Phase-shift methodProposed method
      fx /λfy /λfz /λfx /λfy /λfz /λ
      11.05010.87691.11251.05790.88451.1153
      21.58271.87560.13241.58711.87030.1327
      33.11102.99780.44413.10713.00110.4419
      45.56484.52290.10055.57384.52720.0984
      56.78457.77890.99086.77587.78360.9893
      68.01258.66650.78258.01148.66280.7845
      79.54259.11270.84569.54069.11530.8441
      811.230610.58480.542911.234510.58680.5448
      913.497612.08000.494513.501512.07630.4930
      1015.686714.13490.787815.682914.13150.7904
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    Zhe Zhang, Donghui Zheng, Lei Chen, Jinpeng Li. Carrier Frequency Calculation of Interference Fringes at Low Spatial Frequencies[J]. Acta Optica Sinica, 2024, 44(4): 0412005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 31, 2023

    Accepted: Nov. 30, 2023

    Published Online: Feb. 27, 2024

    The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)

    DOI:10.3788/AOS231718

    CSTR:32393.14.AOS231718

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