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Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 294(2023)

Semi-Analytical Theoretical Modeling of Basin Type Piezoelectric Macro-Micro Planar Actuator

WANG Zheyi, HE Honglin, LI Ji, LONG Yufan, and LI Chenjie
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    WANG Zheyi, HE Honglin, LI Ji, LONG Yufan, LI Chenjie. Semi-Analytical Theoretical Modeling of Basin Type Piezoelectric Macro-Micro Planar Actuator[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 294

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    Paper Information

    Received: Nov. 7, 2022

    Accepted: --

    Published Online: Nov. 29, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.02.024

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology