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Chinese Journal of Lasers, Volume. 51, Issue 12, 1202409(2024)

Advances in MEMS Sensors Based on Two‑Photon Polymerization 3D Printing (Invited)

Yuxin Wang1,2, Changrui Liao1,2、*, Mengqiang Zou1,2, Weijia Bao1,2, Dejun Liu1,2, Li Zhang3, and Yiping Wang1,2
Author Affiliations
  • 1Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, Shenzhen Key Laboratory of Ultrafast Laser Micro-Nano Manufacturing, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, Guangdong , China
  • 2National Key Laboratory of RF Heterogeneous Integration, Guangdong and HongKong Joint Research Centre for Optical Fibre Sensors, Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Shenzhen University, Shenzhen 518060, Guangdong , China
  • 3Department of Mechanical and Automation Engineering, the Chinese University of Hong Kong, Shatian999077, Hong Kong , China
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    Article index updated: Sep. 5, 2025

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    Yuxin Wang, Changrui Liao, Mengqiang Zou, Weijia Bao, Dejun Liu, Li Zhang, Yiping Wang. Advances in MEMS Sensors Based on Two‑Photon Polymerization 3D Printing (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202409

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Feb. 22, 2024

    Accepted: May. 8, 2024

    Published Online: Jun. 6, 2024

    The Author Email: Changrui Liao (cliao@szu.edu.cn)

    DOI:10.3788/CJL240609

    CSTR:32183.14.CJL240609

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology