[1] [1] Godyak V A.Plasma Sources,Science and Technology,2011,20(2):4.

[4] [4] Lawler J E.Plasma Source Sci.Technol.,2004,13(2):321.

[5] [5] Hidekazu Miyahara,Takahiro Iwai,Kaburaki Y,et al.Analytical Sciences February,2014,30(2):231.

[7] [7] Dimitrijevic M S,Christova M,Sahal Bréchot.Physica Scripta,2007,75(6):809.

[8] [8] Finn G D,Mugglestone D.Monthly Notices of the Royal Astronomical Society,1965,129(2):221.

[9] [9] Xu S,Ostrikov K N,Luo W,et al.I.J.Vac.Sei.Teehnol.A,2000,18(5):2185.

[10] [10] Ganapathy S,Parthasarathi V.Indian Journal of Pure and Applied Physics,1977,15(2):63.

[11] [11] Singh S V,Kempkes P,Soltwisch H.Appl.Phys.Lett.,2006,89(16):161501.

[12] [12] Hebner G A,Miller P A.J.Appl.Phys.,2000,87(12):8304.

[13] [13] Vladimir N.Ochkin Spectroscopy of Low Temperature Plasma.Russia:Wiley-VCH,2009.3.

[14] [14] Griem H R.Plasma Spectroscopy.New York:McGraw Hill,1964.1.