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Chinese Journal of Lasers, Volume. 38, Issue s1, 108005(2011)

Adopting the Ratio of Defect Size Over Depth to Quantitatively Study the Effect of Defect Size on the Measurement of Defect Depth

Zeng Zhi1,2,2,3,4、*, Tao Ning1,2,2,3, Feng Lichun1,2,2,3, and Zhang Cunlin1,2,2,3
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  • 2[in Chinese]
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    Zeng Zhi, Tao Ning, Feng Lichun, Zhang Cunlin. Adopting the Ratio of Defect Size Over Depth to Quantitatively Study the Effect of Defect Size on the Measurement of Defect Depth[J]. Chinese Journal of Lasers, 2011, 38(s1): 108005

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    Paper Information

    Category: Measurement and metrology

    Received: Jul. 10, 2011

    Accepted: --

    Published Online: Dec. 19, 2011

    The Author Email: Zhi Zeng (zzh406@hotmail.com)

    DOI:10.3788/cjl201138.s108005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology