[5] [5] KAPPERA R, VOIRY D, YALCIN S E, et al. Phase-engineered low-resistance contacts for ultrathin MoS2 transistors［J］. Nature Materials, 2014, 13(12): 1128-1134.

[7] [7] WEI Z, TANG J, LI X Y, et al. Wafer-scale oxygen-doped MoS2monolayer ［J］. Small Methods, 2021, 5(6): 2100091.

[8] [8] TANG J, WEI Z, WANG Q Q, et al. In situ oxygen doping of monolayer MoS2 for novel electronics［J］. Small, 2020, 16(42): e2004276.

[9] [9] CAO Y P, GAN S, GENG Z X, et al. Optically tuned terahertz modulator based on annealed multilayer MoS2［J］. Scientific Reports, 2016, 6: 22899.

[10] [10] PET J, OLLR T, VANCS P, et al. Spontaneous doping of the basal plane of MoS2 single layers through oxygen substitution under ambient conditions［J］. Nature Chemistry, 2018, 10(12): 1246-1251.

[12] [12] CAI L, HE J F, LIU Q H, et al. Vacancy-induced ferromagnetism of MoS2 nanosheets［J］. Journal of the American Chemical Society, 2015, 137(7): 2622-2627.

[14] [14] COLEMAN J N, LOTYA M, O'NEILL A, et al. Two-dimensional nanosheets produced by liquid exfoliation of layered materials［J］. Science, 2011, 331(6017): 568-571.

[18] [18] ZHU J Q, WANG Z C, YU H, et al. Argon plasma induced phase transition in monolayer MoS2［J］. Journal of the American Chemical Society, 2017, 139(30): 10216-10219.