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Laser & Optoelectronics Progress, Volume. 56, Issue 10, 100601(2019)

Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining

Yuan Jiang1, Yi Jiang1、*, Liuchao Zhang1, and Sumei Wang2
Author Affiliations
  • 1 School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2 Laser Micro/Nano Fabrication Laboratory, Beijing Institute of Technology, Beijing 100081, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    References (16)
    Cited By (3)
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    Figures & Tables(9)
    Schematic of manufacturing process of fiber pressure sensor

    Fig. 1. Schematic of manufacturing process of fiber pressure sensor

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    Micrographs of sensor before and after femtosecond laser machining. (a) Before machining; (b) after machining

    Fig. 2. Micrographs of sensor before and after femtosecond laser machining. (a) Before machining; (b) after machining

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    Spectrum of HF before and after femtosecond laser machining

    Fig. 3. Spectrum of HF before and after femtosecond laser machining

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    Schematic of fiber pressure sensor

    Fig. 4. Schematic of fiber pressure sensor

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    Test system of fiber pressure sensor

    Fig. 5. Test system of fiber pressure sensor

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    Relationship between optical cavity length of pressure sensor and gas pressure in pressure range of 0-5 MPa. (a) Pressure increasing; (b) pressure decreasing

    Fig. 6. Relationship between optical cavity length of pressure sensor and gas pressure in pressure range of 0-5 MPa. (a) Pressure increasing; (b) pressure decreasing

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    Relationship between optical cavity length of sensor and gas pressure in pressure range of 0-0.4 MPa. (a) Pressure increasing; (b) pressure decreasing

    Fig. 7. Relationship between optical cavity length of sensor and gas pressure in pressure range of 0-0.4 MPa. (a) Pressure increasing; (b) pressure decreasing

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    Measuring fluctuation of cavity length

    Fig. 8. Measuring fluctuation of cavity length

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    • Table 1. Comparison of proposed sensor and other fiber pressure sensors

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      Table 1. Comparison of proposed sensor and other fiber pressure sensors

      SensorRange /MPaSensitivity /(nm·MPa-1)Resolution /kPa
      End-facesensor 1[5]0-21.0369.7
      End-facesensor 2[6]0-0.14164.56-
      Side-wallsensor 1[10]0-202147.6
      Non-diaphragmsensor 1[11]0-14.22523.7
      Non-diaphragmsensor 2[14]0-1.24.0285.0
      Proposedsensor0-510202.4
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    Yuan Jiang, Yi Jiang, Liuchao Zhang, Sumei Wang. Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining[J]. Laser & Optoelectronics Progress, 2019, 56(10): 100601

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Nov. 7, 2018

    Accepted: Dec. 7, 2018

    Published Online: Jul. 4, 2019

    The Author Email: Yi Jiang (bitjy@bit.edu.cn)

    DOI:10.3788/LOP56.100601

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology