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Spectroscopy and Spectral Analysis, Volume. 37, Issue 10, 2995(2017)

Spectroscopic Method for Diagnosing PS-PVD Jet of Different Gas Composition

WANG Kai1, LIU Min2, MAO Jie2, DENG Zi-qian2, and WEN Kui1
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  • 2[in Chinese]
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    WANG Kai, LIU Min, MAO Jie, DENG Zi-qian, WEN Kui. Spectroscopic Method for Diagnosing PS-PVD Jet of Different Gas Composition[J]. Spectroscopy and Spectral Analysis, 2017, 37(10): 2995

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    Paper Information

    Received: Aug. 18, 2016

    Accepted: --

    Published Online: Dec. 25, 2017

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2017)10-2995-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology