Fig. 1. Schematic of structured light 3D imaging

Fig. 2. Refractive index n and extinction coefficient k of Si-H and SiO₂. (a) Refractive index; (b) extinction coefficient

Fig. 3. Theoretical spectral design curves of the front surface

Fig. 4. Design curves of reflection spectra of rear surface

Fig. 5. Theoretical curves of double-sided transmission

Fig. 6. Flow chart of thin film preparation

Fig. 7. Spectral test curves

Fig. 8. Measuring results of filter fabricated by reactive sputtering. (a)AFM image; (b)SEM image

Fig. 9. Surface roughness of Si-H fabricated by two sputtering methods. (a) Reactive sputtering; (b) DC magnetron sputtering

Fig. 10. Voltage fluctuation diagram of target material

Fig. 11. Working principle of auxiliary anode

Fig. 12. Measuring results of filter fabricated by inductively coupled and DC sputtering. (a)AFM image; (b)SEM image

Fig. 13. Spectral test curves