Fig. 1. Laser beam splitter implementation schematic

Fig. 2. Flow chart of parameter calculation algorithm

Fig. 3. Microprism array splitter profile

Fig. 4. Diamond turning schematic diagram

Fig. 5. Laser direct writing schematic diagram

Fig. 6. Moving mask schematic diagram

Fig. 7. Optical path diagram of laser beam splitter performance test

Fig. 8. Schematic diagram of the simulation structure of the 1×3 beam splitter

Fig. 9. Laser source irradiance distribution

Fig. 10. Output light pattern of the 1×3 beam splitter

Fig. 11. Flow chart of laser direct writing

Fig. 12. Microprism array shot

Fig. 13. Profilometer test result

Fig. 14. Diagram of test the optical path

Fig. 15. CCD camera spot acquisition image. (a) Incident spot; (b) Output spot

Fig. 16. 50 m output spot

Fig. 17. Deflection distance calibration diagram