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Opto-Electronic Engineering, Volume. 40, Issue 3, 67(2013)

Wavefront Measurement of Diffraction Grating Based on Laser Interferometer

QIAN Linyong1,2、*, HUANG Yuanshen1,2, ZHANG Dawei1,2, NI Zhengji1,2, and ZHUANG Songlin1,2
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  • 2[in Chinese]
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    QIAN Linyong, HUANG Yuanshen, ZHANG Dawei, NI Zhengji, ZHUANG Songlin. Wavefront Measurement of Diffraction Grating Based on Laser Interferometer[J]. Opto-Electronic Engineering, 2013, 40(3): 67

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    Paper Information

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    Received: Sep. 29, 2012

    Accepted: --

    Published Online: Apr. 7, 2013

    The Author Email: Linyong QIAN (Leonqly@126.com)

    DOI:10.3969/j.issn.1003-501x.2013.03.011

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology