Chinese Optics Letters, Volume. 5, Issue s1, 272(2007)

Influences of thickness ratio of two materials on the residual stress of multilayers

Yanming Shen1...2,*, Shuying Shao1,2, Hongbo He1, Jianda Shao1 and Zhengxiu Fan1 |Show fewer author(s)
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
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    CLP Journals

    [1] Xiao Qiling, He Hongbo, Shao Shuying, Shao Jianda, Fan Zhengxiu. Influence of Deposition Temperature on Residual Stress of Yttria-Stabilized Zirconia Thin Films[J]. Acta Optica Sinica, 2008, 28(5): 1007

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    Yanming Shen, Shuying Shao, Hongbo He, Jianda Shao, Zhengxiu Fan, "Influences of thickness ratio of two materials on the residual stress of multilayers," Chin. Opt. Lett. 5, 272 (2007)

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    Paper Information

    Received: Jan. 1, 1949

    Accepted: --

    Published Online: Jul. 15, 2007

    The Author Email: Yanming Shen (shenyanming@mail.siom.ac.cn)

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