Acta Optica Sinica, Volume. 40, Issue 8, 0805001(2020)
Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency
[1] Goncharsky A, Goncharsky A, Durlevich S. Diffractive optical element for creating visual 3D images[J]. Optics Express, 24, 9140-9148(2016).
[2] Symeonidis M, Nakagawa W, Kim D C et al. High-resolution interference microscopy of binary phase diffractive optical elements[J]. OSA Continuum, 2, 2496-2510(2019).
[6] Buralli D A, Morris G M. Effects of diffraction efficiency on the modulation transfer function of diffractive lenses[J]. Applied Optics, 31, 4389-4396(1992).
[7] Arieli Y, Ozeri S, Eisenberg N et al. Design of a diffractive optical element for wide spectral bandwidth[J]. Optics Letters, 23, 823-824(1998).
[8] Yang H F, Xue C X, Li C et al. Diffraction efficiency sensitivity to oblique incident angle for multilayer diffractive optical elements[J]. Applied Optics, 55, 7126-7133(2016).
[9] Mao S, Zhao L D, Zhao J L. Integral diffraction efficiency model for multilayer diffractive optical elements with wide angles of incidence in case of polychromatic light[J]. Optics Express, 27, 21497-21507(2019).
[10] Thiele S, Pruss C, Herkommer A M et al. 3D printed stacked diffractive microlenses[J]. Optics Express, 27, 35621-35630(2019).
[11] Roeder M, Thiele S, Hera D et al. Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding[J]. Journal of Manufacturing Processes, 47, 402-409(2019).
[14] Zhao L D, Cui Q F, Mao S et al. Effect of the surface roughness on the efficiency of diffractive optical elements[J]. Applied Optics, 57, 10276-10283(2018).
[15] Yang L L, Liu C L, Li S Q. Optimal design of depth-scaling error for multilayer diffractive optical elements with oblique incidence[J]. Applied Optics, 56, 4532-4536(2017).
[16] Gao L, Xue C X, Yang H F et al. Effect of decenter errors on diffraction efficiency of multilayer diffractive optical elements in long infrared waveband[J]. Acta Optica Sinica, 36, 0623004(2015).
[17] Mao S, Zhao J L. Tolerance analysis on decenter error of multilayer diffractive optical elements based on polychromatic integral diffraction efficiency[J]. Applied Optics, 58, 2422-2428(2019).
[18] Swanson G J. Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements[R]. Lexington: MIT Lincoln Laboratory Technical Report, 914(1991).
[20] Xue C X, Cui Q F. Design of multilayer diffractive optical elements with polychromatic integral diffraction efficiency[J]. Optics Letters, 35, 986-988(2010).
Get Citation
Copy Citation Text
Liangliang Yang, Chenglin Liu, Falin Lu, Qiaoying Tong, Yongbing Zhao, Renjia Guo. Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency[J]. Acta Optica Sinica, 2020, 40(8): 0805001
Category: Diffraction and Gratings
Received: Dec. 6, 2019
Accepted: Jan. 6, 2020
Published Online: Apr. 13, 2020
The Author Email: Yang Liangliang (yang_liangliang@163.com)