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Acta Optica Sinica, Volume. 42, Issue 11, 1134005(2022)

Recent Progress in Nanofabrication of High Resolution X-Ray Zone Plate Lenses by Electron Beam Lithography

Yifang Chen*
Author Affiliations
  • School of Information Science and Technology, Fudan University, Shanghai 200433, China
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    Article index updated: Mar. 10, 2025

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    Yifang Chen. Recent Progress in Nanofabrication of High Resolution X-Ray Zone Plate Lenses by Electron Beam Lithography[J]. Acta Optica Sinica, 2022, 42(11): 1134005

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    Paper Information

    Category: X-Ray Optics

    Received: Feb. 9, 2022

    Accepted: Apr. 18, 2022

    Published Online: Jun. 3, 2022

    The Author Email: Chen Yifang (yifangchen@fudan.edu.cn)

    DOI:10.3788/AOS202242.1134005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology