[9] [9] GAVALDA DIAZ O, GARCIA LUNA G, LIAO Z R, et al. The new challenges of machining Ceramic Matrix Composites (CMCs): Review of surface integrity［J］. International Journal of Machine Tools and Manufacture, 2019, 139: 24-36.

[12] [12] LIU Y S, WANG J, LI W N, et al. Effect of energy density and feeding speed on micro-holes drilling in SiC/SiC composites by picosecond laser［J］. The International Journal of Advanced Manufacturing Technology, 2016, 84(9-12): 1917-1925.

[14] [14] ZHAI Z Y, WEI C, ZHANG Y C, et al. Investigations on the oxidation phenomenon of SiC/SiC fabricated by high repetition frequency femtosecond laser［J］. Applied Surface Science, 2020, 502: 144131.